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Download Fabrication Engineering at the Micro- and Nanoscale PDF free

By Applied Electronics - Sunday, January 15, 2017 No Comments
Download Fabrication Engineering at the Micro- and Nanoscale PDF free.

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This book on semiconductor fabrication covers processes that are used to fabricate integrated circuits(IC). It explains the various fabrication techniques and covers silicon mostly but GaAs semiconductors are also covered. The physics and chemistry of each process are explained with the required equipments that are used to do the processes. It uses Silvaco Athena software with sets of codes examples to illustrate the design process. That is the process of diffusion, oxidation, lithography and deposition. From there on it explains how such different unit processes are integrated to build CMOS transistor and IC.

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